Disc Sputtering Equipment (CVF-5000 Series)
Chugai Ro's Sputtering Equipment performs film coating with sufficient reproducibility on printed circuit boards that are flat and comparatively small in a state of excellent film thickness and component distribution. The adaptability of this product over process changes is high, and the product can be used for development as well as mass-production use.
This product can incorporate optimum devices for a variety of applications for the production of magnetic heads, magnetic sensors, solar cells, and display devices as well as memory media, such as optical disc and DVD.
·Inline Sputtering Equipment
The Inline Sputtering Equipment for the mass production of optical discs incorporates a vacuum stocker chamber that accommodates up to 12 pallets. The product is equipped with a disc-handling robot to ensure fully automatic operation.
·Two-room Inter-back Type Sputtering Equipment
The Two-room Inter-back Type Sputtering Equipment for optical discs incorporates a load lock chamber. This chamber accommodates up to two pallets with improvement in the efficiency of the vacuuming time and recovery time of atmosphere pressure. This product has been adopted for the research and development of models incorporating a single chamber.
·Magazine Load-lock Type Sputtering Equipment
The Sputtering Equipment for optical discs incorporates a magazine load-lock chamber that accommodates up to 10 pallets. This product supports applications for the research, development, and sample production of models.
By modifying the magazine load-lock chamber into a vacuum stocker chamber, an expansion of the line for full-fledged production will be possible with ease at minimal cost.
·Three-room Inter-back Type Sputtering Equipment
The Three-room Inter-back Type Sputtering Equipment for DVD-RAM production incorporates a tilt hanger arm function for single pallet use, thus ensuring an ideal system configuration for DVD-RAM production. This product supports applications for the research, development, and sample production of models, and an expansion of the line for full-fledged production will be possible with ease at minimal cost.
This product can incorporate optimum devices for a variety of applications for the production of magnetic heads, magnetic sensors, solar cells, and display devices as well as memory media, such as optical disc and DVD.
·Inline Sputtering Equipment
The Inline Sputtering Equipment for the mass production of optical discs incorporates a vacuum stocker chamber that accommodates up to 12 pallets. The product is equipped with a disc-handling robot to ensure fully automatic operation.
·Two-room Inter-back Type Sputtering Equipment
The Two-room Inter-back Type Sputtering Equipment for optical discs incorporates a load lock chamber. This chamber accommodates up to two pallets with improvement in the efficiency of the vacuuming time and recovery time of atmosphere pressure. This product has been adopted for the research and development of models incorporating a single chamber.·Magazine Load-lock Type Sputtering Equipment
The Sputtering Equipment for optical discs incorporates a magazine load-lock chamber that accommodates up to 10 pallets. This product supports applications for the research, development, and sample production of models.By modifying the magazine load-lock chamber into a vacuum stocker chamber, an expansion of the line for full-fledged production will be possible with ease at minimal cost.
·Three-room Inter-back Type Sputtering Equipment
The Three-room Inter-back Type Sputtering Equipment for DVD-RAM production incorporates a tilt hanger arm function for single pallet use, thus ensuring an ideal system configuration for DVD-RAM production. This product supports applications for the research, development, and sample production of models, and an expansion of the line for full-fledged production will be possible with ease at minimal cost.