Special Sputtering Equipment
·Compact General-purpose Sputtering Equipment (CSP-3000 Series)
The Compact General-purpose Sputtering Equipment incorporates three sputtering cathodes and a substrate heating and cooling mechanism to support the research and development of a variety of processes. This product of multi-cathode type makes it possible to form three types of synthetic film. Furthermore, the generation of synthetic film with co-sputters is possible.
The product employs a sputter rise method, thus making it possible to process powder as well.
·Next-generation Disc Sputtering Equipment (CSP-6000 Series)
This is a side-sputtering product of batch type with four cathode units built in. The product has a variety of features including a unique substrate rotation and revolution mechanism, cathode mechanism, and T-S adjustment function. The product is excellent in film thickness distribution and forms film with minimal contamination.
Besides, the product incorporates a substrate heating mechanism and RF reverse sputter mechanism and supports a variety of optional functions.
·MR Head Sputtering Equipment (CSP-4000 Series)
This product is a sputtering machine with a load-lock chamber that makes it possible to mount up to six cathode units. The product incorporates a substrate auto loading function, heating and cooling function, cleaning function, and magnetic field impressing function as well. Furthermore, with the adoption of an ultrahigh-vacuum chamber to keep the surface of film clean, improvement in the quality of thin multi-layer film is made.
·Through-type Sputtering Equipment (CSP-1000 Series)
This product incorporates a transfer roller mechanism that horizontally moves substrates loaded on pallets, thus coating the substrates with thin film when they pass through the sputtering cathode.
Chugai Ro attaches importance to a stability increase in the process of thin-film coating on large-scale substrates in a wide shape variety, with a decrease in contamination, and improvement in ease of maintenance. Therefore, Chugai Ro provides the Through-type Sputtering Equipment with unique know-how incorporated.
The Compact General-purpose Sputtering Equipment incorporates three sputtering cathodes and a substrate heating and cooling mechanism to support the research and development of a variety of processes. This product of multi-cathode type makes it possible to form three types of synthetic film. Furthermore, the generation of synthetic film with co-sputters is possible.The product employs a sputter rise method, thus making it possible to process powder as well.
·Next-generation Disc Sputtering Equipment (CSP-6000 Series)
This is a side-sputtering product of batch type with four cathode units built in. The product has a variety of features including a unique substrate rotation and revolution mechanism, cathode mechanism, and T-S adjustment function. The product is excellent in film thickness distribution and forms film with minimal contamination.
Besides, the product incorporates a substrate heating mechanism and RF reverse sputter mechanism and supports a variety of optional functions.
·MR Head Sputtering Equipment (CSP-4000 Series)
This product is a sputtering machine with a load-lock chamber that makes it possible to mount up to six cathode units. The product incorporates a substrate auto loading function, heating and cooling function, cleaning function, and magnetic field impressing function as well. Furthermore, with the adoption of an ultrahigh-vacuum chamber to keep the surface of film clean, improvement in the quality of thin multi-layer film is made.
·Through-type Sputtering Equipment (CSP-1000 Series)
This product incorporates a transfer roller mechanism that horizontally moves substrates loaded on pallets, thus coating the substrates with thin film when they pass through the sputtering cathode.
Chugai Ro attaches importance to a stability increase in the process of thin-film coating on large-scale substrates in a wide shape variety, with a decrease in contamination, and improvement in ease of maintenance. Therefore, Chugai Ro provides the Through-type Sputtering Equipment with unique know-how incorporated.