This product is designed for the research and development of thin-film deposit on substrates in a vacuum evaporation, ion plating, or sputtfering method, any of which is freely selectable. Transfer trays are employed to move the substrates to the position of evaporation in either of the two vacuum chambers of the product as desired. Therefore, layers of film can be laminated without letting the substrates be exposed to the air. A function to heat substrates is provided.
In addition, Chugai Ro can provide unique thin-film generation equipment with a variety of options built in according to the request.